Coating Equipments

AIPocket™



The AIPocket™ PVD coating system puts Kobelco’s industry-leading AIP® technology into a compact, versatile system for coating inserts, shaft tools, hobs, molds and smaller parts for the automotive, aerospace and medical industries. A flexible, easy-to-use system that employs Kobelco’s latest cathode technology, while maximizing productivity with faster cycle times and easy-to-change targets. Recipes are repeatable and adjustable, producing quality coating loads time after time.

Specifications

Dimensions W1,400 x L1,900 x H2,200mm
Coating Zone φ 360 × H300mm
Productivity Typical batch cycle time: 3 hours
Arc Evaporation Source 2 faces

Promotional Video

 

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AIP®-S series

The AIP®-S series is a batch system using the Arc Ion Plating (AIP®) method. This flexible system can be used for a wide variety of coating applications. The AIP®-S series achieves smooth surfaces while maintaining a high deposition rate.

Features

  1. Droplets, a major defect of Cathodic arc deposition, are successfully minimized by AIP®.
  2. Thick & dense film with extremely smooth surface
  3. High deposition rate by High energy density & High ionization
  4. Multi-layer films & multi process films are possible

Super Fine Cathode

Plasma range
extended by SFC

Mehr Infos

Fine Cathode

Plasma Enhanced
Cathode

Normal Cathode

Conventional
Cathode

Machine Lineup

Production scale medium scale production large scale production
Recommended
Loading Space
φ 450mm
x H 500mm
or
φ 130mm
x H 500mm
x 6 spindles
φ 700mm
x H 700mm
or
φ 130mm
x H 700mm
x 12 spindles
Arc Evaporation Source 6 to 12 8 to 16
Substrate Table 6-Spindles planetary rotary table 12-Spindles planetary rotary table

Effect of Fine Cathode


Material: Carbide, Work Piece: AISI 316, Cutting Speed: 270 [m/min], Coolant: Wet
Material: Carbide, Workpiece: AISI A48-94a, Cutting speed: 220 [m/min], Coolant: Dry,

New Technology

Recently we have launched the SFC (Super Fine Cathode), a newly developed cathode which has advantages due to tuning the magnetic field around the cathode.
  • Residual stress is adjustable by substrate bias while covering all range of existing AIP® cathodes.
  • Thick coatings (up to 20 μm) with low internal stress is possible
  • Boltless structure enables to change targets with one-touch operation
  • Productivity is increased by improvement of yield rate of target (20 % up)

Coating Thickness Distribution

 

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AIP® Systems for Special Use

KOBELCO offers AIP® coating systems for a wide range of applications.

AIP® In-Line System

The AIP® In-Line system is suitable for large series production. This system achieves efficient production by carrying out evacuation, preheating, coating and cooling in separated chambers.

Features
  • A highly advanced fully-automatic control system can be interlocked with the preceding and subsequent processes.
  • Controlling the AIP® operation data by personal computer facilitates highly efficient operational management.

Chamber module construction can facilitate flexible chamber combinations, such as 5 chamber or 6 chamber systems according to coating requirement.



AIP® System for Piston Rings

AIP®-G Series

We have AIP® systems specialized for specific purpose.
AIP®-G series has been developed to make thick film for piston rings.

AIP®-G series is using newly-designed cathode which is called Super Fine Cathode.
  • Superior film thickness uniformity
  • Efficient use of target
  • Suitable to make thick film

 

 

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UBMS® Series for DLC

 

UnBalanced Magnetron Sputtering
UBMS® series is batch system using Unbalanced Magnetron Sputtering method. Since this system can provide fine and high density films, it is suitable for lubrication film coating such as DLC and Molybdenum disulfide.

 

Features of UBMS®

  1. Plasma density is increased near substrate by imbalanced magnetic field.
  2. Maximization of ion-assist effect.
  3. Control of Film Properties: Composition, Adhesion, Crystallization, Surface condition.
Argon ion is activated in plasma and hits target.   Activated argon ion sputters out metal atom from target.   Film deposition is made with sputtered metal ion.



KOBELCO DLC Coating is excellent in wear resistance, low friction and toughness with Nano-multilayered structure.

Well Balanced DLC Film

Machine Lineup

Production scale medium scale production large scale production
Recommended
Loading Space
φ 450mm
x H 400mm
or
φ 130mm
x H 400mm
x 6 spindles
φ 700mm
x H 800mm
or
φ 130mm
x H 800mm
x 12 spindles
Sputtering Source 4 7
Substrate Table 6-Spindles planetary rotary table 12-Spindles planetary rotary table

Features of DLC by UBMS®

DLC (Diamond-like carbon) has widespread applications such as car parts, mechanical components, dies, molds etc. because of its high mechanical hardness, chemical inertness, and low friction behavior. KOBELCO can offer optimized DLC for each customer’s target by tuning coating parameters.

Applications of DLC and more

  • Automobile parts (engine parts/ fuel pump parts)
  • Mechanical parts (Ball bearing, ball screw, hydraulic pump parts)
  • Cutting tools for aluminum
  • Spinning tools for aluminum can
  • Trimming dies for SUS/Copper tube
  • Punches for SUS/aluminum sheet

and more

Advanced DLC by UBMS®

  • High Adhesion DLC
    • Ion assist effect by UBM
    • Optimized Interlayer
  • Hardness control and Multi-layer DLC
    • Ion assist effect by UBM
  • Metal-doped DLC
    • Co-sputter with metal target and carbon
  • Hydrogen content controlled DLC
    • Solid carbon source
  • Hybrid coating with AIP

and more

Effect of KOBELCO DLC

BELCOATTM by UBMS®

Name Type Hardness
(Hv)
Thickness
(μm)
Feature & Typical Applications
BELCOAT
B
Standard 1,500
to
2,500
0.5
to
5
Balance of Wear Resistance, Lubricity and Adhesion.Common Mechanical Component.
BELCOAT
HB
High
Hardness
2,500
to
3,500
0.1
to
0.2
Focused on Wear Resistance Automotive Component Stamping Mold (For Non-Iron, Stainless Steel)
BELCOAT
UB
Ultra High
Hardness
3,500
to
4,000
0.1
to
0.2
Focused on Wear Resistance Under High Pressure Automotive Component For Racing Use Cutting Tool(Non-Iron)
BELCOAT
NB
Nano-Multi
Layer
1,500
to
2,500
0.1
to
0.15
Balance of Wear Resistance and Lubricity Toughness with Shock Resistant, Bearing, Punching Die
BELCOAT
MB
Metal Doped 1,000
to
2,000
0.15
to
0.25
Property Change by Metal Doping Relief of Film Stress Automotive Component, Plastic Injection Mold

 

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Hybrid System (AIP® + UBMS®)

KOBELCO’s Hybrid System has both AIP® cathodes and UBMS® cathodes in one chamber and can operate these two types of cathodes alternately or together. Depositing more complex and high-end coatings is now possible.
The HYBRID system can expand possibilities of R&D and/or Production for more sophisticated films in various industrial fields.

Typical Coating Applications
Multi Component Coating
Nano Multilayer Coating
TiCrAlN/WN,CrN/BCN etc.
- Cutting Tools
- Dies and Molds
- Automotive Parts etc.


Drilling Test

 

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AIPocket™

AIPocket™

The AIPocket™ PVD coating system puts Kobelco’s industry-leading AIP ®  technology into a compact, versatile system for coating inserts, shaft tools, hobs, molds and smaller parts for the...

AIP<sup>®</sup>-S series

AIP®-S series

The AIP ® -S series is a batch system using the Arc Ion Plating (AIP ® ) method. This flexible system can be used for a wide variety of coating applications. The AIP ® -S series achieves smooth...

AIP<sup>®</sup> Systems for Special Use

AIP® Systems for Special Use

KOBELCO offers AIP ® coating systems for a wide range of applications. AIP ® In-Line System The AIP ® In-Line system is suitable for large series production. This system achieves efficient...

UBMS<sup>®</sup> Series for DLC

UBMS® Series for DLC

  UnBalanced Magnetron Sputtering UBMS ® series is batch system using Unbalanced Magnetron Sputtering method. Since this system can provide fine and high density films, it is suitable for...

Hybrid System (AIP<sup>®</sup> + UBMS<sup>®</sup>)

Hybrid System (AIP® + UBMS®)

KOBELCO’s Hybrid System has both AIP ® cathodes and UBMS ® cathodes in one chamber and can operate these two types of cathodes alternately or together. Depositing more complex and high-end coatings is now...

News

PSE 2020 - in Garmisch - Partenkirchen, Germany
17th International Conference on Plasma Surface Engineering

We exhibit -
September 6-11, 2020

More Information More News

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